Is almost impossible to believe the fact that the instruments and machines involved in electronic music, are more than 120 years old.
here you will see the complete list and an evolution explanation of them, This evolution is divided in 4 steps:
1870-1915: Early Experiments
1915-1960: The Vacuum Tube Era.
1960-1980: Integrated Circuits.
1980-present: The Digital Revolution.
Some of this instruments have funny names like The celluphone and The variophone.
Surfing this web page I found this interesting story:
“Elisha Gray would have been known to us as the inventor of the telephone if Alexander Graham bell hadn’t got to the patent office one hour before him” nevertheless Elisha Gray accidentaly contributed with electronic music, because he built The Musical Telegraph in (1876) using electromagnetic circuits and a single note oscillator.

Max Mathews a.k.a “The father of computer music” predicts that by 2010, “almost all music will be made electronically, by digital circuits.”
Which will be the next step on this impredictable evolution?

Here you can see a video of one this crazy instruments.